A sensor to measure arsine gas in the ppb range.
With the AsH3/C-1 and the AsH3/M-1 MEMBRAPOR presents two extremely highly sensitive sensors, which allow the highly toxic gas Arsine to be measured in the ppb range.
Despite its past as a component in chemical weapons, Arsine is now a common technical product in the semiconductor industry. Arsine is used as a doping gas on a large scale and in significant quantities in the context of thermal doping of silicon in the diffusion process and in ion implantation. To ensure safety, all processes need to be controlled and monitored with electrochemical Arsine sensors.