Semiconductor industry
In the semiconductor industry, electronic components are manufactured based on silicon wafers. The properties of the semiconductors are modified through targeted doping. Hydrides such as AsH3, B2H6 or PH3 are used for this purpose. Acids such as HCl or HF are used in etching and cleaning processes. Due to their high toxicity, they must be strictly monitored to ensure personal and equipment safety.
Your benefits with Membrapor sensors
 | Excellent performance Most sensitive sensors on the market for monitoring ppb-levels |
 | Low operating costs On average 50 % lower response times reduce the need for expensive calibration gas |
 | Optimized process control Improved gas consumption in etching and cleaning processes optimizes operational costs |
Product Selection
The product selection below reflects the recommendation for use in the semiconductor industry.
Sensors
Compact
Modules
Compact
| AsH3 | HF | HCN | HCl | PH3 | SiH4 |
|---|---|---|---|---|---|
| CAL | CAL | CAL | CAL | CAL | CAL |
| AsH3/C-1-CAL | HF/Cl-10-CAL | HCN/C-50-CAL | HCl/C-20-CAL | PH3/C-5-CAL | SiH4/C-50-CAL |
| AFE | AFE | AFE | AFE | AFE | AFE |
| AsH3/C-1-AFE | HF/Cl-10-AFE | HCN/C-50-AFE | HCl/C-20-AFE | PH3/C-5-AFE | SiH4/C-50-AFE |
Miniature
| AsH3 | HF | HCN | HCl | PH3 | SiH4 |
|---|---|---|---|---|---|
| CAL | CAL | CAL | CAL | CAL | CAL |
| AsH3/M-1-CAL | – | HCN/M-50-CAL | HCl/M-20-CAL | PH3/M-5-CAL | SiH4/M-50-CAL |